A400® DUO vertical furnace
A400 DUO is a batch vertical furnace for 200mm and smaller wafers, and focuses on applications in the markets for power, analog, RF, and MEMS devices.
ALD (Atomic Layer Deposition)
It can be applied to produce different oxides, nitrides or other compounds. 3. ALD benefits. ALD provides excellent surface control and can produce thin, ...
ASM Company Overview
The two key pillars of ASM's vertically integrated materials business are: Mining and recovery of critical metal oxides from the polymetallic Dubbo Project in ...
Hafnium
Hafnium metal is currently highly desired for certain aerospace and industrial alloys, while hafnium oxide is emerging as a material of choice in semiconductors ...
Our technology & products
The silicon found in sand is in the form of silicon dioxide. To make chips, manufacturers need pure silicon. That's why the first step in the process is to ...
SONORA® 300mm vertical furnace
SONORA® is a 300mm batch vertical furnace for logic/foundry and memory applications, as well as 300mm analog/power. Read about it and its applications.
Vertical furnace
Oxidation forms a silicon oxide layer on the wafer's surface, which acts as an insulating or protective layer over it. Our products. Vertical furnaces are ...